Patent Assignment
Reel/Frame 027180/0667
Assignment of Assignor's Interest
Recorded: 2011-11-05
Pages: 3
Assignors
TINER, ROBIN L.
Executed: 2011-08-17
CHOI, SOO YOUNG
Executed: 2011-08-17
WANG, QUNHUA
Executed: 2011-08-22
CHEN, JRJYAN JERRY
Executed: 2011-08-18
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Showerhead Support Structure for Improved Gas Flow