Patent Assignment
Reel/Frame 027189/0554
Assignment of Assignor's Interest
Recorded: 2011-11-08
Pages: 3
Assignor
KLEINSCHMIDT, JUERGEN
Executed: 2011-11-04
Assignee
XTREME TECHNOLOGIES GMBH
15 STEINBACHSTRASSE, AACHEN, 52074, GERMANY
Covered Property
(1)
Method and Arrangement for the Stabilization of the Source Location of the Generation of Extreme Ultraviolet (Euv) Radiation Based on a Discharge Plasma
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.