Patent Assignment
Reel/Frame 027189/0884
Assignment of Assignor's Interest
Recorded: 2011-11-08
Pages: 2
Assignor
SIX, STEPHAN
Executed: 2011-11-07
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Imaging with Reduced Immersion Liquid Evaporation Effects