Patent Assignment
Reel/Frame 027199/0519
Assignment of Assignor's Interest
Recorded: 2011-11-09
Pages: 5
Assignors
CHENG, NAI-HAN
Executed: 2011-10-03
LIN, CHIN-HSIANG
Executed: 2011-10-03
YANG, CHI-MING
Executed: 2011-10-07
CHANG, CHUN-LIN
Executed: 2011-10-07
HWANG, CHIH-HONG
Executed: 2011-10-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Multi-Ion Beam Implantation Apparatus and Method