Patent Assignment
Reel/Frame 027201/0554
Assignment of Assignor's Interest
Recorded: 2011-11-09
Pages: 7
Assignors
MCCHESNEY, JON
Executed: 2011-10-19
SRIRAMAN, SARAVANAPRIYAN
Executed: 2011-10-20
MARSH, RICKY
Executed: 2011-10-19
PATERSON, ALEX
Executed: 2011-10-19
HOLLAND, JOHN
Executed: 2011-10-19
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538-6401
Covered Property
(1)
Systems For Cooling RF Heated Chamber Components