Patent Assignment
Reel/Frame 027208/0664
Assignment of Assignor's Interest
Recorded: 2011-11-10
Pages: 3
Assignors
MIZUNO, NORIKAZU
Executed: 2011-10-28
KATO, TOMOHIDE
Executed: 2011-10-28
NODA, TAKAAKI
Executed: 2011-10-28
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.