Patent Assignment
Reel/Frame 027208/0814
Assignment of Assignor's Interest
Recorded: 2011-11-10
Pages: 4
Assignor
YAMAZAWA, YOHEI
Executed: 2011-10-03
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus