Patent Assignment
Reel/Frame 027217/0636
Assignment of Assignor's Interest
Recorded: 2011-11-11
Pages: 3
Assignors
SIRARD, STEPHEN M.
Executed: 2011-10-13
HYMES, DIANE
Executed: 2011-10-13
SCHOEPP, ALAN M.
Executed: 2011-10-13
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Substrate Freeze Dry Apparatus and Method