Patent Assignment
Reel/Frame 027229/0021
Assignment of Assignor's Interest
Recorded: 2011-11-15
Pages: 3
Assignors
KAKIMOTO, AKINOBU
Executed: 2011-11-02
KOMORI, KATSUHIKO
Executed: 2011-11-02
HASEBE, KAZUHIDE
Executed: 2011-10-31
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Formation Apparatus