Patent Assignment
Reel/Frame 027244/0140
Assignment of Assignor's Interest
Recorded: 2011-11-17
Pages: 5
Assignors
YEH, MING-HSI
Executed: 2011-10-03
CHUANG, KUO-SHENG
Executed: 2011-10-03
CHIEN, YING-HSUEH CHANG
Executed: 2011-10-03
YANG, CHI-MING
Executed: 2011-10-17
LIN, CHIN-HSIANG
Executed: 2011-10-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
In-Situ Backside Cleaning of Semiconductor Substrate