Patent Assignment
Reel/Frame 027244/0456
Assignment of Assignor's Interest
Recorded: 2011-11-17
Pages: 4
Assignors
LEE, BO-I
Executed: 2011-09-27
KANG, HUANG SOON
Executed: 2011-10-06
YANG, CHI-MING
Executed: 2011-10-06
LIN, CHIN-HSIANG
Executed: 2011-10-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and Apparatus for Performing a Polishing Process in Semiconductor Fabrication