Patent Assignment
Reel/Frame 027244/0742
Assignment of Assignor's Interest
Recorded: 2011-11-17
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Multi-Layer Pattern for Alternate Ald Processes