Patent Assignment
Reel/Frame 027254/0926
Assignment of Assignor's Interest
Recorded: 2011-11-18
Pages: 4
Assignors
DEGUCHI, MASATOSHI
Executed: 2011-10-28
FUNAKOSHI, HIDEO
Executed: 2011-10-28
TAKEI, TOSHICHIKA
Executed: 2011-10-28
SATO, NORIFUMI
Executed: 2011-10-28
KIYOTA, WATARU
Executed: 2011-10-28
ISHIMARU, DAISUKE
Executed: 2011-10-28
MACHIDORI, SHINICHI
Executed: 2011-10-28
SUNAKA, IKUO
Executed: 2011-10-31
KAMEI, SHIGENORI
Executed: 2011-11-01
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Treatment System, Substrate Treatment Method, and Non-Transitory Computer Storage Medium