Patent Assignment
Reel/Frame 027309/0860
Assignment of Assignor's Interest
Recorded: 2011-12-01
Pages: 4
Assignors
OGAWA, UNRYU
Executed: 2011-10-06
OKUNO, MASAHISA
Executed: 2011-10-06
AKAO, TOKUNOBU
Executed: 2011-10-06
YASHIMA, SHINJI
Executed: 2011-10-06
UMEKAWA, ATSUSHI
Executed: 2011-10-06
MINAMI, KAICHIRO
Executed: 2011-10-06
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus Having Rotatable Slot-Type Antenna and Method of Manufacturing Semiconductor Device Using the Same