Patent Assignment
Reel/Frame 027314/0221
Assignment of Assignor's Interest
Recorded: 2011-12-01
Pages: 3
Assignor
YANG, HONG-JUN
Executed: 2011-11-07
Assignee
SEMICS INC.
C-803 BUNDANG TECHNOPARK, 145 YATAP-DONG, BUNDANG-GU, GYEONGGI-DO, SEONGNAM-SI, 463-760, KOREA, REPUBLIC OF
Covered Property
(1)
Wafer Probe Station Capable of Actively Controlling Tilt of Chuck and Controlling Method Thereof