Patent Assignment
Reel/Frame 027318/0191
Assignment of Assignor's Interest
Recorded: 2011-12-02
Pages: 3
Assignors
KEIL, DOUGLAS
Executed: 2011-11-22
AUGUSTYNIAK, EDWARD
Executed: 2011-11-18
LEESER, KARL
Executed: 2011-11-18
SABRI, MOHAMED
Executed: 2011-11-18
Assignee
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Mechanical Suppression of Parasitic Plasma in Substrate Processing Chamber