Patent Assignment
Reel/Frame 027319/0396
Assignment of Assignor's Interest
Recorded: 2011-12-02
Pages: 2
Assignors
SASAKI, YUICHIRO
Executed: 2011-08-03
KUBOTA, MASAFUMI
Executed: 2011-08-08
HAYASHI, SHIGENORI
Executed: 2011-08-08
Assignee
PANASONIC CORPORATION
1006 OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN
Covered Property
(1)
Method for Fabricating Semiconductor Device and Plasma Doping Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.