Patent Assignment
Reel/Frame 027324/0443
Assignment of Assignor's Interest
Recorded: 2011-12-03
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Methods for Forming Mems Devices