Patent Assignment
Reel/Frame 027362/0594
Assignment of Assignor's Interest
Recorded: 2011-12-11
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Process Control Using Ray Tracing-Based Libraries and Machine Learning Systems