Patent Assignment
Reel/Frame 027364/0223
Assignment of Assignor's Interest
Recorded: 2011-12-12
Pages: 3
Assignors
KOSHIMIZU, CHISHIO
Executed: 2011-10-11
YAMAWAKU, JUN
Executed: 2011-10-13
MATSUDO, TATSUO
Executed: 2011-10-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Temperature Measuring Method, Storage Medium, and Program