Patent Assignment
Reel/Frame 027371/0566
Assignment of Assignor's Interest
Recorded: 2011-12-13
Pages: 4
Assignors
HOOGENDAM, CHRISTIAAN ALEXANDER
Executed: 2005-02-16
LOOPSTRA, ERIK ROELOF
Executed: 2005-02-16
STREEFKERK, BOB
Executed: 2005-02-16
GELLRICH, BERNARD
Executed: 2005-02-07
WURMBRAND, ANDREAS
Executed: 2005-01-17
Assignees
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, DL-5504 DR, NETHERLANDS
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method