Patent Assignment
Reel/Frame 027374/0575
Assignment of Assignor's Interest
Recorded: 2011-12-13
Pages: 8
Assignors
YANG, JANG-GYOO
Executed: 2011-12-06
MILLER, MATTHEW L.
Executed: 2011-11-15
CHEN, XINGLONG
Executed: 2011-10-24
CHUC, KIEN N.
Executed: 2011-10-24
LIANG, QIWEI
Executed: 2011-10-24
VENKATARAMAN, SHANKAR
Executed: 2011-10-26
LUBOMIRSKY, DMITRY
Executed: 2011-10-26
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Semiconductor Processing System and Methods Using Capacitively Coupled Plasma