Patent Assignment
Reel/Frame 027400/0609
Assignment of Assignor's Interest
Recorded: 2011-12-16
Pages: 6
Assignors
MOHN, JONATHAN D.
Executed: 2011-12-15
TE NIJENHUIS, HARALD
Executed: 2011-12-15
HAMILTON, SHAWN M.
Executed: 2011-12-15
MADRIGAL, KEVIN
Executed: 2011-12-15
LINGAMPALLI, RAMKISHAN RAO
Executed: 2011-12-15
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
System and Apparatus for Flowable Deposition in Semiconductor Fabrication