Patent Assignment
Reel/Frame 027404/0532
Assignment of Assignor's Interest
Recorded: 2011-12-16
Pages: 3
Assignee
TEGAL CORPORATION
2201 S. MCDOWELL BOULEVARD, PETALUMA, CALIFORNIA, 94954
Covered Property
(1)
Nanolayer Thick Film Processing System and Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.