Patent Assignment
Reel/Frame 027404/0552
Assignment of Assignor's Interest
Recorded: 2011-12-16
Pages: 3
Assignee
TEGAL CORPORATION
2201 S. MCDOWELL BOULEVARD, PETALUMA, CALIFORNIA, 94954
Covered Property
(1)
Nanolayer Thick Film Processing System
Application:
11/739,637 →
Publication:
US 2007/0251451