Patent Assignment
Reel/Frame 027425/0318
Assignment of Assignor's Interest
Recorded: 2011-12-21
Pages: 7
Assignors
YAMAMOTO, KATSUHIKO
Executed: 2011-11-08
TAKEBAYASHI, YUJI
Executed: 2011-11-08
SAITO, TATSUYUKI
Executed: 2011-11-21
OKUNO, MASAHISA
Executed: 2011-11-08
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method, Substrate Processing Apparatus and Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.