Patent Assignment
Reel/Frame 027432/0808
Assignment of Assignor's Interest
Recorded: 2011-12-22
Pages: 3
Assignor
HANAOKA, HIDETOSHI
Executed: 2011-12-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus