Patent Assignment
Reel/Frame 027432/0841
Assignment of Assignor's Interest
Recorded: 2011-12-22
Pages: 4
Assignors
KASAI, SHIGERU
Executed: 2011-12-08
SUZUKI, AYUTA
Executed: 2011-12-08
SAWADA, IKUO
Executed: 2011-12-08
SHINDO, NAOKI
Executed: 2011-12-12
YONEDA, MASATAKE
Executed: 2011-12-09
OOYA, KAZUHIRO
Executed: 2011-12-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus, Liquid Processing Method, and Recording Medium Having Program for Executing Liquid Processing Method Recorded Therein