Patent Assignment
Reel/Frame 027453/0399
Assignment of Assignor's Interest
Recorded: 2011-12-28
Pages: 3
Assignors
BALUJA, SANJEEV
Executed: 2011-12-14
ROCHA-ALVAREZ, JUAN CARLOS
Executed: 2011-12-13
DEMOS, ALEXANDROS T.
Executed: 2011-12-14
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus for Modulating Wafer Treatment Profile in Uv Chamber