Patent Assignment
Reel/Frame 027462/0704
Assignment of Assignor's Interest
Recorded: 2011-12-30
Pages: 2
Assignor
HUDSON, ERIC
Executed: 2011-11-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System, Method and Apparatus of a Wedge-Shaped Parallel Plate Plasma Reactor for Substrate Processing