Patent Assignment
Reel/Frame 027470/0150
Assignment of Assignor's Interest
Recorded: 2012-01-03
Pages: 2
Assignors
SUZUKI, MAKOTO
Executed: 2011-12-01
TANIMOTO, KENJI
Executed: 2011-12-01
YAMAMOTO, TAKUMA
Executed: 2011-12-05
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Charged Particle Beam Apparatus and Method for Stably Obtaining Charged Particle Beam Image