Patent Assignment
Reel/Frame 027482/0443
Assignment of Assignor's Interest
Recorded: 2012-01-05
Pages: 3
Assignors
HA, JEONGSEOK
Executed: 2011-12-16
FUKUDA, HIDEAKI
Executed: 2011-12-16
KAIDO, SHINTARO
Executed: 2011-12-20
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method of Forming Metal Oxide Hardmask