Patent Assignment
Reel/Frame 027498/0341
Assignment of Assignor's Interest
Recorded: 2012-01-09
Pages: 3
Assignor
YAMAZAKI, SHUNPEI
Executed: 2011-12-19
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device