Patent Assignment
Reel/Frame 027500/0219
Assignment of Assignor's Interest
Recorded: 2011-12-27
Pages: 3
Assignor
SON, DUKHYUN
Executed: 2011-12-19
Assignee
SEMES CO., LTD.
#278, MOSI-RI, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Adjustable Capacitor, Plasma Impedance Matching Device, Plasma Impedance Matching Method, and Substrate Treating Apparatus