Patent Assignment
Reel/Frame 027548/0094
Assignment of Assignor's Interest
Recorded: 2012-01-18
Pages: 5
Assignors
LAFARRE, RAYMOND WILHELMUS LOUIS
Executed: 2011-12-22
TEN KATE, NICOLAAS
Executed: 2011-12-22
DZIOMKINA, NINA VLADIMIROVNA
Executed: 2011-12-22
KARADE, YOGESH PRAMOD
Executed: 2011-12-22
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, and Method of Manufacturing a Substrate Holder