Patent Assignment
Reel/Frame 027564/0505
Assignment of Assignor's Interest
Recorded: 2012-01-20
Pages: 6
Assignors
SMILDE, HENDRIK JAN HIDDE
Executed: 2012-01-04
BLEEKER, ARNO JAN
Executed: 2012-01-09
COENE, WILLEM MARIE JULIA MARCEL
Executed: 2012-01-11
KUBIS, MICHAEL
Executed: 2012-01-10
WARNAAR, PATRICK
Executed: 2012-01-02
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method