Assignment of Assignor's Interest

Recorded: 2012-01-20 Pages: 2

Assignors

KATO, MASAHIKO

Executed: 2011-10-25

FUJIWARA, NAOZUMI

Executed: 2011-10-26

MIYA, KATSUHIKO

Executed: 2011-10-26

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN

Covered Property (1)

Substrate Processing Method and Substrate Processing Apparatus

Patent: 8,623,146 →

Application: 13/353,883 →

Publication: US 2012/0186275

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.