Patent Assignment
Reel/Frame 027576/0728
Assignment of Assignor's Interest
Recorded: 2012-01-23
Pages: 4
Assignor
YAEGASHI, HIDETAMI
Executed: 2012-01-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Forming Mask Pattern