Patent Assignment
Reel/Frame 027580/0488
Assignment of Assignor's Interest
Recorded: 2012-01-24
Pages: 2
Assignors
KAGOSHIMA, AKIRA
Executed: 2011-12-12
SHIRAISHI, DAISUKE
Executed: 2011-12-12
NAGATANI, YUJI
Executed: 2011-12-12
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME,, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.