Patent Assignment
Reel/Frame 027605/0797
Assignment of Assignor's Interest
Recorded: 2012-01-27
Pages: 3
Assignor
FUJIMORI, YOSHIHIKO
Executed: 2011-11-28
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Method for Inspecting Substrate, Substrate Inspection Apparatus, Exposure System, and Method for Producing Semiconductor Device