Patent Assignment
Reel/Frame 027615/0524
Assignment of Assignor's Interest
Recorded: 2012-01-30
Pages: 5
Assignors
PROSYENTSOV, VITALIY
Executed: 2012-01-18
VENEMA, WILLEM JURRIANUS
Executed: 2012-01-19
TROOST, KARS ZEGER
Executed: 2012-01-18
VAN DER WIELEN, ADRIANUS MARTINUS
Executed: 2012-01-18
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method of Operating a Patterning Device and Lithographic Apparatus