Patent Assignment
Reel/Frame 027631/0054
Assignment of Assignor's Interest
Recorded: 2012-02-01
Pages: 2
Assignors
WATANABE, TOMOYUKI
Executed: 2011-12-14
YAKUSHIJI, MAMORU
Executed: 2011-12-14
MORIMOTO, MICHIKAZU
Executed: 2011-12-14
ONO, TETSUO
Executed: 2011-12-15
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME,, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Etching Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.