Patent Assignment
Reel/Frame 027646/0612
Assignment of Assignor's Interest
Recorded: 2012-02-03
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Methods for Small Trench Patterning Using Chemical Amplified Photoresist Compositions