Patent Assignment
Reel/Frame 027653/0793
Assignment of Assignor's Interest
Recorded: 2012-02-05
Pages: 3
Assignors
CHEN, ZHIYING
Executed: 2012-01-30
ZHAO, JIANPING
Executed: 2012-01-30
CHEN, LEE
Executed: 2012-01-30
FUNK, MERRITT
Executed: 2012-01-30
SUNDARARAJAN, RADHA
Executed: 2012-01-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Variable Capacitance Chamber Component Incorporating Ferroelectric Materials and Methods of Manufacturing and Using Thereof