Patent Assignment
Reel/Frame 027690/0449
Assignment of Assignor's Interest
Recorded: 2012-02-13
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Focus Ring and Substrate Processing Apparatus Having Same
Application:
13/344,926 →
Publication:
US 2012/0176692