Patent Assignment
Reel/Frame 027710/0080
Assignment of Assignor's Interest
Recorded: 2012-02-15
Pages: 2
Assignor
HATAKEYAMA, JUN
Executed: 2012-01-26
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process