Patent Assignment
Reel/Frame 027713/0538
Assignment of Assignor's Interest
Recorded: 2012-02-15
Pages: 2
Assignors
CHEN, LUNG-TAI
Executed: 2011-11-28
LIN, SHIH-CHIEH
Executed: 2011-11-28
HSU, YU-WEN
Executed: 2011-11-28
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
NO. 195, SEC. 4, CHUNG HSING ROAD, CHUTUNG, HSINCHU, 31040, TAIWAN
Covered Property
(1)
Structure and Process for Microelectromechanical System-Based Sensor