Patent Assignment
Reel/Frame 027715/0561
Assignment of Assignor's Interest
Recorded: 2012-02-16
Pages: 5
Assignors
TSAI, PO-FENG
Executed: 2011-11-15
HO, CHIA-TONG
Executed: 2011-11-15
WANG, JO FEI
Executed: 2011-11-18
MOU, JONG-I
Executed: 2011-11-15
LIN, CHIN-HSIANG
Executed: 2011-11-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and System for Tool Condition Monitoring Based on a Simulated Inline Measurement