Patent Assignment
Reel/Frame 027716/0883
Assignment of Assignor's Interest
Recorded: 2012-02-16
Pages: 2
Assignors
MARUYAMA, TORU
Executed: 2012-02-10
SONE, TADAKAZU
Executed: 2012-02-10
MOTOSHIMA, YASUYUKI
Executed: 2012-02-10
Assignee
EBARA CORPORATION
11-1 HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Apparatus Having Temperature Regulator for Polishing Pad