Patent Assignment
Reel/Frame 027719/0028
Assignment of Assignor's Interest
Recorded: 2012-02-16
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
System and Method for Using First-Principles Simulation to Analyze a Process Performed by a Semiconductor Processing Tool
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.